The system enables high resolution exposure, because the system has an auto-alignment function for both top and back surface of wafer, and has three modes in exposure process, proximity, hard contact and soft contact mode.
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3000 Scott Blvd Suite 203
Santa Clara, California 95054
United States
Phone: +1 (408) 844-8008
Fax: +1 (408) 844-8944
Email: info@seiwaamerica.com
© Seiwa Optical America Inc. 2023
© Seiwa Optical America Inc. 2023